Senin, Nicola, Blunt, Liam and Tolley, Martin (2012) The use of areal surface topography analysis for the inspection of micro-fabricated thin foil laser targets for ion acceleration. Measurement Science and Technology, 23 (10). p. 105004. ISSN 0957-0233Metadata only available from this repository.
This paper proposes a novel approach to the characterization of critical dimensions and geometric form error at micro and sub-micrometric scales, suitable for application to micro-fabricated parts and devices. Thin foil laser targets for ion acceleration experiments are selected as the test subject in this instance. The approach is based on acquiring areal maps with a high-precision 3D optical interferometric profilometer and on processing the surface topography data with novel techniques obtained by merging knowledge and algorithms from surface metrology, dimensional metrology and computer vision/image processing for quality inspection. This new approach allows quantitative measurement results for the thin foil laser target to be obtained, and shows promise for being applied to a wide array of similar problems involving quality inspection of micro-parts and devices, and to structured surfaces in general.
|Subjects:||T Technology > T Technology (General)|
|Schools:||School of Computing and Engineering|
School of Computing and Engineering > Centre for Precision Technologies
School of Computing and Engineering > Centre for Precision Technologies > Surface Metrology Group
School of Computing and Engineering > Centre for Precision Technologies > EPSRC Centre for Innovative Manufacturing in Advanced Metrology
|Depositing User:||Sharon Beastall|
|Date Deposited:||05 Sep 2012 10:42|
|Last Modified:||21 Jan 2013 16:21|
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