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Design and development of a self calibrated optical chip interferometer for high precision on-line surface measurement

Kumar, Prashant, Martin, Haydn, Maxwell, Graeme and Jiang, Xiang (2012) Design and development of a self calibrated optical chip interferometer for high precision on-line surface measurement. In: Proceedings of The Queen’s Diamond Jubilee Computing and Engineering Annual Researchers’ Conference 2012: CEARC’12. University of Huddersfield, Huddersfield, p. 152. ISBN 978-1-86218-106-9

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Abstract

Surface characterization plays an important role in many manufacturing processes. In this paper we
propose the development of a hybrid optical chip interferometer device which will allow online surface measurement at high precision with improved autonomy. The research methodology involves the integration of individual optoelectronic components onto a silicon daughterboard which is then incorporated on a silica motherboard to produce the final hybrid structure. The fundamental principle of operation of the device is based on wavelength scanning interferometry and optical phase measurement techniques. The integrated optics chip device combined with an optical probe will be compact and robust and may be used for high precision surface measurement and absolute distance
measurement.

Item Type: Book Chapter
Uncontrolled Keywords: surface metrology, integrated optics, interferometry, wavelength scanning, phase shifting
Subjects: T Technology > TA Engineering (General). Civil engineering (General)
Schools: School of Computing and Engineering
School of Computing and Engineering > Centre for Precision Technologies
School of Computing and Engineering > Computing and Engineering Annual Researchers' Conference (CEARC)
School of Computing and Engineering > Centre for Precision Technologies > Surface Metrology Group
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Depositing User: Sharon Beastall
Date Deposited: 03 May 2012 11:27
Last Modified: 03 May 2012 11:27
URI: http://eprints.hud.ac.uk/id/eprint/13488

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