Fast surface metrology using wavelength scanning and dispersive white light interferometry

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Hassan, Mothana A., Jiang, Xiang and Haydn, Martin (2012) Fast surface metrology using wavelength scanning and dispersive white light interferometry. In: Proceedings of The Queen’s Diamond Jubilee Computing and Engineering Annual Researchers’ Conference 2012: CEARC’12. University of Huddersfield, Huddersfield, p. 148. ISBN 978-1-86218-106-9

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Abstract

A new optical interferometery technique is to measure surfaces at the micro and nano-scales based on the wavelength dispersive multiplexing technique with high speed imposition. Interferometery is an important technique which can provide high resolution measurement of surface topography. In this paper an interferometer with a dispersive probe, sourced by a super-luminescent diode is considered.
One important parameter for the effective operation of such an interferometer is the fringe visibility. In this paper the fringe visibility of the first order diffracted light is compared with the reflected (zero order) light from the grating. This is done by modulating the reference beam of the interferometer and recording the fringe modulation on a CCD array. The fringe visibility formed from the first order beam
was found to be lower than the zero order, resulting from the efficiency of the diffraction grating.

Item Type:	Book Chapter
Uncontrolled Keywords:	surface metrology, interferometer, phase shifting, dispersive probing.
Subjects:	T Technology > TA Engineering (General). Civil engineering (General)
Schools:	School of Computing and Engineering School of Computing and Engineering > Automotive Engineering Research Group School of Computing and Engineering > Computing and Engineering Annual Researchers' Conference (CEARC) School of Computing and Engineering > Diagnostic Engineering Research Centre School of Computing and Engineering > Diagnostic Engineering Research Centre > Energy, Emissions and the Environment Research Group School of Computing and Engineering > Diagnostic Engineering Research Centre > Machinery Condition and Performance Monitoring Research Group School of Computing and Engineering > Diagnostic Engineering Research Centre > Measurement System and Signal Processing Research Group School of Computing and Engineering > High Performance Computing Research Group School of Computing and Engineering > Informatics Research Group School of Computing and Engineering > Informatics Research Group > XML, Database and Information Retrieval Research Group School of Computing and Engineering > Pedagogical Research Group School of Computing and Engineering > Systems Engineering Research Group
Depositing User:	Sharon Beastall
Date Deposited:	03 May 2012 11:29
Last Modified:	29 Nov 2012 12:30
URI:	http://eprints.hud.ac.uk/id/eprint/13484

Fast surface metrology using wavelength scanning and dispersive white light interferometry

Abstract

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