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The use of interferometry and image analysis techniques for metrology of MST devices

Blunt, Liam, Jiang, Xiang, Xiao, Shaojun and Scott, Paul J. (2004) The use of interferometry and image analysis techniques for metrology of MST devices. In: 8th International Symposium on Measurement and Quality Control in Production, 12th-15th October, 2004, Erlangen, Germany. (Unpublished)

Metadata only available from this repository.
Item Type: Conference or Workshop Item (Paper)
Subjects: T Technology > T Technology (General)
T Technology > TS Manufactures
Schools: School of Computing and Engineering
School of Computing and Engineering > Centre for Precision Technologies
School of Computing and Engineering > Centre for Precision Technologies > Surface Metrology Group
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Depositing User: Briony Heyhoe
Date Deposited: 21 Jul 2008 13:16
Last Modified: 26 Nov 2010 12:01
URI: http://eprints.hud.ac.uk/id/eprint/1144

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