The use of interferometry and image analysis techniques for metrology of MST devices

Tools

Blunt, Liam, Jiang, Xiang, Xiao, Shaojun and Scott, Paul J. (2004) The use of interferometry and image analysis techniques for metrology of MST devices. In: 8th International Symposium on Measurement and Quality Control in Production, 12th-15th October, 2004, Erlangen, Germany. (Unpublished)

Metadata only available from this repository.

Item Type:	Conference or Workshop Item (Paper)
Subjects:	T Technology > T Technology (General) T Technology > TS Manufactures
Schools:	School of Computing and Engineering School of Computing and Engineering > Centre for Precision Technologies School of Computing and Engineering > Centre for Precision Technologies > Surface Metrology Group
Related URLs:	Conference Author Author Author Conference
Depositing User:	Briony Heyhoe
Date Deposited:	21 Jul 2008 14:16
Last Modified:	26 Nov 2010 12:01
URI:	http://eprints.hud.ac.uk/id/eprint/1144

Item control for Repository Staff only:

View Item